JPH0347603B2 - - Google Patents

Info

Publication number
JPH0347603B2
JPH0347603B2 JP19842282A JP19842282A JPH0347603B2 JP H0347603 B2 JPH0347603 B2 JP H0347603B2 JP 19842282 A JP19842282 A JP 19842282A JP 19842282 A JP19842282 A JP 19842282A JP H0347603 B2 JPH0347603 B2 JP H0347603B2
Authority
JP
Japan
Prior art keywords
thin film
thickness
substrate
photosensitive substrate
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19842282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5986916A (ja
Inventor
Eiji Iegi
Atsushi Yamagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP19842282A priority Critical patent/JPS5986916A/ja
Publication of JPS5986916A publication Critical patent/JPS5986916A/ja
Publication of JPH0347603B2 publication Critical patent/JPH0347603B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP19842282A 1982-11-11 1982-11-11 複合圧電共振子 Granted JPS5986916A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19842282A JPS5986916A (ja) 1982-11-11 1982-11-11 複合圧電共振子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19842282A JPS5986916A (ja) 1982-11-11 1982-11-11 複合圧電共振子

Publications (2)

Publication Number Publication Date
JPS5986916A JPS5986916A (ja) 1984-05-19
JPH0347603B2 true JPH0347603B2 (en]) 1991-07-19

Family

ID=16390836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19842282A Granted JPS5986916A (ja) 1982-11-11 1982-11-11 複合圧電共振子

Country Status (1)

Country Link
JP (1) JPS5986916A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04241505A (ja) * 1991-01-14 1992-08-28 Murata Mfg Co Ltd 圧電薄膜振動子
JP3323343B2 (ja) * 1994-04-01 2002-09-09 日本碍子株式会社 センサ素子及び粒子センサ
DE69714909T2 (de) * 1996-05-27 2003-04-30 Ngk Insulators, Ltd. Piezoelektrisches Element des Dünnschichttyps
US5925972A (en) * 1996-09-27 1999-07-20 Ngk Insulators, Ltd. Multiple element particle sensor and signal processing electronics
WO2004088840A1 (ja) * 2003-03-31 2004-10-14 Ube Industries, Ltd. 圧電薄膜デバイス及びその製造方法

Also Published As

Publication number Publication date
JPS5986916A (ja) 1984-05-19

Similar Documents

Publication Publication Date Title
US8766514B2 (en) Piezoelectric resonator element and piezoelectric resonator
US8415858B2 (en) Piezoelectric vibrating pieces and devices, and methods for manufacturing same
US7485238B2 (en) Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same
JPH05199057A (ja) 表面弾性波素子およびその製造方法
JPH0347603B2 (en])
JPH06204776A (ja) 圧電薄膜振動子の製造方法
JP5936438B2 (ja) 圧電振動デバイスの製造方法
JPH1168496A (ja) 弾性表面波デバイスの構造及び製造方法
JP5364185B2 (ja) 圧電振動片の製造方法
JP2016174328A (ja) ウェーハの製造方法及びウェーハ
US4651042A (en) Piezoelectric vibrator and manufacturing method thereof
JP2011234000A (ja) 音叉型圧電振動片及び圧電ウェハ
JPS58146117A (ja) 圧電振動子の製造方法
JP5234236B2 (ja) 水晶基板および水晶基板の製造方法
JPH0236608A (ja) 弾性表面波素子の周波数調整方法
US4403202A (en) Surface acoustic wave device and method for producing the same
US20150145381A1 (en) Quartz vibrator and manufacturing method thereof
JPH07193450A (ja) 弾性表面波素子及びその製造方法
JPH04294622A (ja) 圧電素子の製造方法
US20230188109A1 (en) Method For Manufacturing Vibrator Element
JPH09260993A (ja) 薄膜構造弾性表面波一方向性変換器と電子装置
JPS6127929B2 (en])
JPS6294008A (ja) 圧電薄膜共振子
JPS5931976B2 (ja) リフトオフ法
JPS5986917A (ja) 表面波装置